Download book Amorphous Silicon Carbide Thin Films : Deposition, Characterization, Etching

Amorphous Silicon Carbide Thin Films : Deposition, Characterization, Etching & Piezoresistive Sensors Applications. Mariana Amorim Fraga

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Author: Mariana Amorim Fraga
Number of Pages: 118 pages
Published Date: 12 Jan 2012
Publisher: Nova Science Publishers Inc
Publication Country: New York, United States
Language: English
ISBN: 9781613247747
File Name: amorphous.silicon.carbide.thin.films.deposition,.characterization,.etching.&.piezoresistive.sensors.applications.pdf
Download Link: amorphous silicon carbide thin films deposition, characterization, etching & piezoresistive sensors applications
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Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.

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